发明名称 |
CALIBRATION SOFTWARE TOOL AND METHOD |
摘要 |
A methodology for calibration of TCAD simulations includes determining a sequence in which values for parameters of physical models are to be determined from comparison of simulation results and experimental measurements. A particular sequence of individual calibration steps is necessary to determine calibration parameters from the measurements. Automatization of the individual calibration steps by computer optimization increases the efficiency of the method.
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申请公布号 |
WO0157740(A3) |
申请公布日期 |
2002.11.14 |
申请号 |
WO2001EP00549 |
申请日期 |
2001.01.18 |
申请人 |
ISE INTEGRATED SYSTEMS ENGINEERING AG |
发明人 |
BENISTANT, FRANCIS;SEPULVEDA, MARCOS;ERLEBACH, AXEL;BOMHOLT, LARS |
分类号 |
G06F17/50;H01L21/66;(IPC1-7):G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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