| 摘要 |
PROBLEM TO BE SOLVED: To provide a supersonic transducer which can make an amplitude of a vibration film large upon vibration, and which can reduce a direct current bias voltage and an alternating current signal voltage. SOLUTION: A supersonic transducer has an upper electrode composed of a vibration film 1 formed by insulation and a conductive film 2 formed on the vibration film, and a lower electrode 12 in which projections and depressions on a surface opposed to the vibration film of the upper electrode, in which the upper electrode and the lower electrode are stuck, supersonic is generated by applying an alternating current signal between the upper electrode and the lower electrode, and the upper electrode is formed to have a lamination structure. COPYRIGHT: (C)2005,JPO&NCIPI
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