| 摘要 |
PROBLEM TO BE SOLVED: To prevent dust suspended in the air generated inside a transfer device for transferring a work in a clean room from leaking out from the transfer device into the clean room and polluting inside of the clean room. SOLUTION: Inside the clean room, two fixed guide rails 21 are disposed, a traveling guide rail 22 is installed between the fixed guide rails 21 in a travelable manner. The fixed guide rails 21 includes traveling spaces 34 for traveling a slider 35 provided on the edges of the traveling guide rail 22, a side surface opening 31, and a sucking perforated passage 49 for sucking the dusts suspended in the air inside the traveling spaces 34 to discharge them outside the clean room. At the edges of the traveling guide rail 22, a discharging/connecting adapter 56 equipped with a sucking device 51 is provided, and one end of the sucking device 51 is communicated with a sucking perforated passage 54 formed in the traveling guide rail 22, and the other end passes through an side surface opening 31 of the fixed guide rail 21 and faces an opening of the sucking perforated passage 49. COPYRIGHT: (C)2008,JPO&INPIT
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