Apparatus and method of measuring terahertz wave

摘要

A time-domain waveform of a terahertz wave is measured by a method based on time-domain spectroscopy by using an optical delay unit to adjust an optical path length along which excitation light propagates thereby adjusting a difference between a time at which the excitation light arrives at a generating unit configured to generate the terahertz wave and a time at which the excitation light arrives at a detection unit configured to detect the terahertz wave. The optical delay unit is driven according to a first speed pattern to acquire a first time-domain waveform. The optical delay unit is then driven according to a second speed pattern different from the first speed pattern to acquire a second time-domain waveform. The first time-domain waveform and the second time-domain waveform are averaged.

主权项

1. A terahertz time domain spectroscopy apparatus comprising:
a laser light source; a generating unit configured to generate terahertz wave; a detection unit configured to detect the terahertz wave; an optical system configured to direct laser light from the laser light source to the generating unit or the detection unit; a driving unit configured to change an optical path length between the laser light source and the generating unit or the detection unit by moving the optical system; a processing unit configured to acquire a time-domain waveform of the terahertz wave based on a detection result of the detection unit, wherein the driving unit moves the optical system according to a first speed pattern and a second speed pattern different from the first speed pattern, and wherein the processing unit acquires the time-domain waveform based on a first detection result detected by the detection unit in a case where the optical system is moved according to the first speed pattern and a second detection result detected by the detection unit in a case where the optical system is moved according to the second speed pattern.