| 摘要 |
PURPOSE:To keep life of a piezoelectric actuator long by a method wherein a film thickness control blade of a film thickness controller is stably operated with the piezoelectric actuator. CONSTITUTION:A film thickness control blade 2 is arranged by being opposed to a circumferential surface of a rotary roller l, and a tip of an output shaft 10 of a displacement generator 50 is made to abut against a rear surface near its tip. In the displacement generator 50, a piezoelectric actuator 7 is provided normally to an inner wall 6a of a box like casing 6, and a movable block 8 equipped with the output shaft 10 is fixed to its tip. A compression spring 9 is provided between the movable block 8 and an inner wall 6b of the casing 6, and the output shaft 10 is provided to an opposed side of the compression spring 9 of the movable block 8. The output shaft 10 presses the film thickness control blade 2 by elastic force of the compression spring 9. |
