| 摘要 |
PURPOSE:To form constantly metallized film of equal quality with stable feed of wire, by, in feeding Al wire to a crucible of a metallizing unit, addition of a metal of a vapor pressure lower than that of Al to Al so as to increase the hardness of the Al. CONSTITUTION:Al ingot 4 is put into a crucible 3 set in an EB gun 2 arranged in vacuum chamber 1, and is evaporated by the irradiation of electron beam 5. When the Al ingot is decreased, Al wire 7 wound by a spool 6 is fed to the crucible. The Al wire 7 is made by mixing Al with a metal of a vapor pressure lower than that of Al to increase the hardness, whereby troubles such as clogging of the roller 8, or cut off of the wire 7 are prevented. This method permits to supply constantly a small quantity of Al without changing the quality of metallized film, hence the operation efficiency of the unit is increased. |
