| 摘要 |
PURPOSE:To prevent fluctuation in film thickness due to the stepped film thickness from developing by a method wherein the diameter of the roll of a roll stamper is set to be 5 times or more as large as the diameter of the stamper and the surface of the roll and the stamper face are flush with each other and the stamper is fixed by suction under vacuum. CONSTITUTION:The diameter of the roll of a roll stamper part 8 is set to be 5 times or more as large as the diameter of the stamper. For example, the diameter of the roll is 1,000mm and its width is 300mm. The recessed part of a stamper suction holder 81 is provided at two locations. The depth (d) of the recessed part is 0.3mm and its diameter is 130.6mmphi. The recessed part is machined with a milling machine and then ground and polished. Suction holes 84 are provided concyclic in one row on the outer periphery side of the stamper suction holder part and in another row at the middle of the radius of the stamper. The stamper is sucked through exhaust system 85, through which the central part of a roll and the suction holes are connected to each other. Each used stamper 83 is made of Ni and has the diameter of 130mmphi and the thickness of 0.3mm. When the stampers 83 are sucked under vacuum under the state being fitted to the grooves of the stamper suction parts 81, the gap (g) between the stamper 83 and the surface 12 of the roll is turned to be 0.3mm. Ultraviolet-curing agent is poured with the needle of an injector in the gap short of overflowing and cured. |
