发明名称 |
PYROLYTIC BORON NITRIDE CONTAINER |
摘要 |
PROBLEM TO BE SOLVED: To provide a pyrolytic boron nitride container, capable of melting and depositing the vapor of a substance reactive with pyrolytic boron nitride or boron and nitrogen and having wide general-purpose properties. SOLUTION: This pyrolytic boron nitride container is composed by forming a protecting layer comprising preferably carbon or a high-melting metal unreactive with a melt in the container so as not to react the pyrolytic boron nitride or its decomposition product with the melt on the inner or the whole surface of the container, in the pyrolytic boron nitride container made of the pyrolytic boron nitride as a substrate. |
申请公布号 |
JPH0959067(A) |
申请公布日期 |
1997.03.04 |
申请号 |
JP19950213228 |
申请日期 |
1995.08.22 |
申请人 |
SHIN ETSU CHEM CO LTD |
发明人 |
KANO MASAKI;KAWADA ATSUO;NAKAJIMA RYOJI;KUROSAWA YUKIO |
分类号 |
C04B41/87;C04B35/583;C04B41/50;C04B41/51;C04B41/85;C04B41/88;C30B15/10;C30B23/06;C30B35/00;H01L21/203 |
主分类号 |
C04B41/87 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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