| 摘要 |
PROBLEM TO BE SOLVED: To provide an antireflection film having a water repellent layer which does not easily peel and has excellent durability and water repellent property, and a method for forming the antireflection film, as well as a device capable of easily and inexpensively producing the antireflection film. SOLUTION: The multilayered antireflection film 2 formed by forming >=2 layers of optical thin films 3 for antireflection consisting of >=2 kinds of materials varying in refractive index on a substrate 1, and forming the water repellent layer of a high-polymer material composed of C, F, H, N, S, O, Si, etc., on the optical thin films, is provided with an intermediate layer composed of any of Al, Ti, Si, Nb, Cr, Cu, Mg, Ta, or Zr at <=10Å between the optical thin films and the water repellent layer. Plural evaporating sources or sputtering devices for forming the optical thin films, an evaporating source or sputtering device consisting of high polymer materials for an the water repellent layer and the evaporating source or sputtering device for an intermediate layer consisting of a material which reactivity bonds with the materials of the thin film of the uppermost layer of the optical thin films and the water repellent layer are prepd in one vacuum vessel to form the films. |
