摘要 |
PROBLEM TO BE SOLVED: To provide a method in which various physical quantities such as adhesion of microscopic deposit on a solid board can be directly and clearly quantitated. SOLUTION: In this physical property evaluation method, the tip 4 of a microscopic elastic body 3 having exciting function is brought into contact with a microscopic deposit 2 on a solid board 1 with no load applied, a microscopic vibration to maximize an amplitude of mechanical vibration on an interface between the microscopic deposit and the solid board is applied to the microscopic deposit from the microscopic elastic body, and if the microscopic elastic body is thereby peeled off from the solid board, physical quantity of adhesion, Young's modulus and viscosity of the deposit is analyzed by the amplitude and frequency of the microscopic vibration. |