| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron emitting element and its manufacturing method, capable of realizing satisfactory surface flatness of an anodic oxide insulating layer, of realizing enhanced withstand voltage properties, and of stabilizing the trajectories of emitted electrons, and providing an electron source, a photographing device and an image forming device, each using the same and capable of improving the reproducibility (resolution) of information signals to be handled. SOLUTION: A lower electrode 2, an anodic oxide insulating layer 3, and an upper electrode 4 are layered in this order on a substrate 1, and the anodic oxide insulating layer 3 is a multilayer structure including a porous layer 3b and having, at least as its uppermost layer, a flat-surface dense layer 3a of high withstand voltage. Pores 5 are vertically bored through the anodic oxide insulating layer 3 and, as an electron emitting part for emitting electrons, carbon 6 is accumulated in the pores 5 so as to be electrically connected to the lower electrode 2. Because the uppermost layer of the anodic oxide insulating layer 3 is the dense layer 3a, its surface flatness can be improved and also the flatness of the upper electrode 4 formed thereon can be held satisfactorily.</p> |
