摘要 |
PROBLEM TO BE SOLVED: To facilitate setting a substrate to be inspected, correctly position the substrate, and butt a leading end of a probe pin perpendicularly to a measurement terminal of the substrate. SOLUTION: A substrate inspection jig has a plurality of erect positioning members 19 and probe pins 18 for positioning the loaded substrate 15 to be inspected. Leading ends of the probe pins 18 are pressed in contact with measurement terminals 15a of the substrate 15. The positioning member 19 includes a sliding shaft part 21 with a cone-shaped leading end part 21a, a holding part 20 for holding the sliding shaft part 21 to be movable back and forth in an axial direction, and an energizing means 22 interposed between the sliding shaft part 21 and the holding part 20 for energizing the sliding shaft part 21 in a projection direction.
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