| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid bearing unit generating no bubbles from filled lubricant in spite of a change in temperature and pressure and having good rotary accuracy without making runout accuracy worse. SOLUTION: The fluid bearing unit is provided with a thrust fluid bearing 36 in which lubricant is filled in a bearing gap C2 between the upper surface 28a of a thrust plate 28 and the lower surface 24b of a sleeve 24 and in which lubricant is also filled in a bearing gap C3 between the lower surface 28b of the thrust plate and the upper surface 20a of counter plate 30. Further, a radial fluid bearing 38, in which lubricant is filled in a bearing gap C1 between the inner peripheral surface of the sleeve 24 and the outer peripheral surface of a shaft member 26, is formed in the fluid bearing unit. Thus, the lubricant used in the fluid bearing unit is left in a vacuum or in an ambient atmosphere of high temperature in advance of filling in the bearing gaps C1, C2, and C3 of the thrust fluid bearing 36 and radial fluid bearing 38.
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