| 发明名称 |
DEPOSITION SOURCE INCLUDING REFLECTOR |
| 摘要 |
A deposition source includes a reflector at an upper end of a frame, the reflector being in a form of a reflection plate in which nozzle apertures are located, the reflector having a sink inclined surface inclining toward a central portion in which the nozzle apertures are located, the nozzles apertures being recessed from an edge front end portion that is on the upper end of the frame. |
| 申请公布号 |
US2016215384(A1) |
申请公布日期 |
2016.07.28 |
| 申请号 |
US201514807028 |
申请日期 |
2015.07.23 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
JEONG Heung Cheol |
| 分类号 |
C23C14/22;C23C14/12 |
主分类号 |
C23C14/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A deposition source, comprising
a reflector at an upper end of a frame, the reflector being in a form of a reflection plate in which nozzle apertures are located, the reflector having a sink inclined surface inclining toward a central portion in which the nozzle apertures are located, the nozzles apertures being recessed from an edge front end portion that is on the upper end of the frame. |
| 地址 |
Yongin-City KR |
