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发明名称
PRODUCTION OF THIN FILM
摘要
申请公布号
JPH04325685(A)
申请公布日期
1992.11.16
申请号
JP19910122035
申请日期
1991.04.24
申请人
SHIN ETSU CHEM CO LTD
发明人
KASHIDA SHU;NAGATA AKIHIKO;NOGUCHI HITOSHI
分类号
C23C14/06;C23C14/34;C23C16/30;C23C16/46;C30B25/10;H01L21/205
主分类号
C23C14/06
代理机构
代理人
主权项
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