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发明名称
ROTATING MECHANISM
摘要
申请公布号
JPH0684775(A)
申请公布日期
1994.03.25
申请号
JP19920230853
申请日期
1992.08.31
申请人
HITACHI LTD
发明人
TAKIZAWA YOSHIHARU;HONMA YOSHIFUMI;SATO TOMOHIRO
分类号
G03F7/16;H01L21/027;H01L21/304;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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