| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer holder, which is improved in tight adhesion with a base board composed of ceramics or sapphire, is nonmagnetic, has conductivity, is to be used for detecting the outer periphery of a wafer or the like and has little reflection with respect to the visible light of 400 to 800 nm. SOLUTION: A wafer holder 1 is constituted by providing an installation area 4 for a wafer W and a non-installation area 5 on a base board 3 composed of ceramics or sapphire and attaching a TiN film 2, having a surface roughness of arithmetic average roughness (Ra) in the range of 0.3 to 0.6μm and a surface resistance rate within a range of 6 to 50Ω/(square) at least in the non- installation area 5.</p> |
