| 摘要 |
A method of inspecting an TFT(Thin Film Transistor) array using an electron beam is provided to inspect transistors formed on a TFT glass of an LCD(Liquid Crystal Display) using an electron beam within a short time. An electron beam generated by an electron beam generator is projected to a pixel electrode connected to a drain electrode of a transistor formed on a TFT glass. When power is applied to a gate line, the pixel electrode and a data line are connected to each other according to the transistor. The transistor is operated by current according to the electron beam. When power is not applied to the gate line, the current according to the electron beam is not generated. |
