| 摘要 |
<P>PROBLEM TO BE SOLVED: To invert a substrate in the middle of conveying the substrate without requiring a new drive force source. <P>SOLUTION: The substrate inverting device includes a first unit and a second unit arranged to face each other. Each of the units is equipped with carriages 1, 1', substrate supporting members 2, 2' mounted on the carriages, rollers 10, 10' provided on the substrate supporting members 2, 2', and fixed cam plates 11, 11' for performing a cam action between the rollers 10, 10', respectively. When the carriers 1, 1' move and a cam action is performed by the rollers 10, 10' and cam plates 11, 11', the substrate supporting members 2, 2' pivotably move between a horizontal position and a vertical position. When the substrate supporting members 2, 2' of the first and second units face each other, respectively, both in vertical positions, a substrate 6 supported by the one substrate supporting member 2 contacts the other substrate supporting member 2', and transfer of the substrate 6 is performed between both of the substrate supporting members 2, 2'. <P>COPYRIGHT: (C)2007,JPO&INPIT |
