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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02151025(A)
申请公布日期
1990.06.11
申请号
JP19880306573
申请日期
1988.12.01
申请人
FUJITSU LTD
发明人
INOUE RIICHI;TAKASAKI KANETAKE;ESHITA TAKASHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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