Method and device for optically detecting position of an article.

摘要

A position detecting method and device is disclosed wherein a radiation beam is projected to a pattern formed on a substrate and having an optical power at least with respect to a first direction, whereby the radiation beam is converged on a predetermined plane, and wherein the position of the substrate with respect to the first direction is determined on the basis of the position of the radiation beam upon the predetermined plane. The radiation beam and the substrate are relatively shifted relative to each other in a second direction orthogonal to the first direction, to thereby produce plural intensity distributions on the predetermined plane with the radiation beam, and the position of the substrate with respect to the first direction is determined by using the produced intensity distributions. <IMAGE> <IMAGE>