| 摘要 |
PROBLEM TO BE SOLVED: To mount a substrate at a position where a cassette is stable by a method, wherein a mount position in a handling station is regulated according to a size of a substrate, or the rotation radius of a transfer robot is regulated so that the substrate is mounted in the cassette or an equipment in a next step. SOLUTION: A transfer robot 120 regulates the length of an arm based on the size of substrates lined up in a handling station, and attracts them at an end part of a transfer chuck 125. Next, arms 120, 124 are rotated in this state, and the substrate is transferred to a cassette, or an equipment in the other steps. At this time, when a transfer robot attracts an original plate 160, the length of the arm is not changed, while rotating to mount the cassette. When attracting a half substrate 162, or a third substrate 164, after the length of the arm is stretched to the length at attracting of the negative plate, the arms 120, 124 are rotated, so that the substrate is mounted on the cassette. Thus, it is possible to mount the substrate at a position where the cassette is stable, irrespective of the size of the substrate. |
