PROBE FOR SCANNING MICROSCOPE MADE BY FOCUSED ION BEAM PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide a probe for scanning microscope in which a nano-tube probe can be fixed and cut off, and a material improvement of the nano-tube probe can be done by injecting different atoms, etc. SOLUTION: The probe for scanning microscope made by the focused ion beam in the scanning microscope probe obtains the physical property of the specimen surface by a tip 14a of a nano-tube probe 12 fixed in a cantilever 4. In this arrangement, it has features to decompose an organic gas G by an ion beam I and fix the nano-tube 12 and the cantilever 4 by a sediment 18 of produced decomposition components in a focused ion beam device. And the probe for a scanning microscope is provide in which an unnecessary sediment 24 adhered in the nano-tube tip 14 can be removed, the length of the probe can be controlled cutting the unnecessary part of the nano-tube and a reforming of the nano-tube probe can be done by injecting ions into the tip of the nano-tube tip 14 using the focused ion beam I.