| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe navigation method, a navigation device and a defect inspection device capable of easily manipulating a probe without the skillfulness of a device user in a charged particle beam device provided with the probe for evaluating electric characteristics. SOLUTION: A sample block on which the probe and a sample are loaded is driven by a standalone drive means, further, a big stage drive means for integrally driving the probe and the sample block is provided, and a CAD navigation method is further introduced. Thus, the handling manner of the device user is improved when the probe is manipulated. COPYRIGHT: (C)2005,JPO&NCIPI
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