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发明名称
Vorrichtung zur Erzeugung angeregter und/oder ionisierter Teilchen in einem Plasma
摘要
申请公布号
DE102004039468(B4)
申请公布日期
2008.09.25
申请号
DE200410039468
申请日期
2004.08.14
申请人
R3T GMBH RAPID REACTIVE RADICALS TECHNOLOGY
发明人
GESCHWANDTNER, ALEXANDER
分类号
H05H1/46;H01J37/32
主分类号
H05H1/46
代理机构
代理人
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