发明名称 Method and apparatus for the automated analysis of three-dimensional objects
摘要 An optomechanical system for illuminating and imaging selected portions of a three dimensional object having specularly reflective surfaces, including a two dimensional image sensor for receiving light reflected from the selected portions and producing an analog output signal representing a two dimensional image of the selected portions over a predetermined time period, a video digitizer for receiving and converting the analog output signal to a digital signal, and an image computer for receiving the digital signal output by the video digitizer, comparing the information obtained from the output digital signal to the stored specifications of a master of the imaged portion of the object, indicating whether the imaged object meets the specifications of the master, controlling the movement of the imaged object, and controlling the operation of the system.
申请公布号 US5030008(A) 申请公布日期 1991.07.09
申请号 US19880255212 申请日期 1988.10.11
申请人 KLA INSTRUMENTS, CORPORATION 发明人 SCOTT, RICHARD S. F.;UZIEL, YORAM;FILICE, FRANCO A.
分类号 G01N21/88;G01N21/93;G01N21/956;G01R31/308;H01L21/00;H01L21/60;H01L21/66 主分类号 G01N21/88
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