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发明名称
ATTACHED-DUST INSPECTING APPARATUS
摘要
申请公布号
JPH03163338(A)
申请公布日期
1991.07.15
申请号
JP19890303586
申请日期
1989.11.22
申请人
TOSHIBA CORP
发明人
SUZUKI NOBUSHI;FUKUI KATSUYUKI
分类号
G01N21/88;G01N21/94;G02F1/13
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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