METHOD FOR STORING FILM-FORMING MATERIAL OF SULFIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for storing a film-forming material of a sulfide containing aluminum sulfide while preventing the surface of the material from being oxidized by moisture so that the material after having been stored can be used for forming an adequate film. SOLUTION: This method for storing the film-forming material of the sulfide containing aluminum sulfide includes storing the material in a fluorine-containing liquid. The fluorine-containing liquid preferably is liquid at 0 to 40°C, and has a boiling point between 75°C and 160°C. A preferred usable fluorine-containing liquid includes a perfluorocompound or a hydrofluoroether. COPYRIGHT: (C)2006,JPO&NCIPI