Device for removing dust from substrate surface for PCB mfr. - blows dust away by compressed air jets and removes by suction

摘要

The device for contact free simultaneous discharge and removal of dust from a substrate surface, has a suction chamber (3), running through to the substrate (2), whose lower surface is smaller than the top surface of the substrate (2). A high voltage ionising electrode (9) is provided in the chamber (3) which is the same width and has outlets (18) through which compressed air (13) is emitted across the surface of the substrate (2) and is drawn away via a suction device. USE/ADVANTAGE - Especially in photomicrolithography. Completely removes any dust or pollution, rather than just sweeping it aside.