| 摘要 |
PURPOSE:To obtain good orientation stability and visual angle characteristic and to enable driving with a low driving voltage without making stages intricate and difficult and making reliability and durability low by using an oriented film having good stability and low pretilt angle and forming projecting parts. CONSTITUTION:A transparent electrode 2 is formed as a counter common electrode on a glass substrate 1 and an SiOX film 3 is sputtered thereon. A positive type photosensitive resist film 4 is applied thereon and is subjected to drying and prebaking. Mask patterns are transferred on this resist film 4 by using a photomask 5 and executing exposing by i rays. The nearly hemispherical projecting parts 6 using the SiOX film 3 as a material are formed by etching the SiOX film 3 of the parts exposed without being covered by the resist patterns. A high polymer film consisting of, for example, a polyimide, is formed to cover nearly the entire surface of the front surface of the glass substrate 1 including the projecting parts 6 and the surface thereof is subjected to a rubbing treatment, by which the oriented film 7 is formed. |
