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发明名称
摘要
申请公布号
JP3162245(B2)
申请公布日期
2001.04.25
申请号
JP19940106045
申请日期
1994.04.20
申请人
发明人
分类号
C23C16/50;C23F4/00;H01L21/203;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/306
主分类号
C23C16/50
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