| 摘要 |
A vibration sensor is provided to compensate for the temperature characteristic of detection sensitivity by using the temperature characteristic of a capacitor. A vibration sensor comprises a vibrator(10) and a driving circuit(20) which mechanically vibrates the vibrator(10), and a detector circuit(30) which detects the physical state of the vibrator(10) with reference to a reference signal(S3) related to a driving signal(S1) of the driving circuit(20) and a detection signal(S4) related to mechanical vibration of the vibrator(10). Temperature characteristic of a phase difference between the reference signal(S3) and the detection signal(S4) compensates for at least a part of temperature characteristic of detection sensitivity of the detection signal(S4) related to the mechanical vibration.
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