摘要 |
PROBLEM TO BE SOLVED: To easily suppress the strength reduction of a beam part when the swing angle of a reflection mirror is increased in an optical scanning element. SOLUTION: The optical scanning element is composed of: a mirror part 2 having a reflection face; mirror supporting parts 3a and 3b connected to the mirror part 2; a first member 8 which is connected to the mirror supporting parts 3a and 3b and has a frame part which gives a torsional displacement to the mirror supporting parts 3a and 3b by vibration; a second member 11 which fixes and holds the frame part 4 of the first member 8; and piezoelectric bodies 12a and 12b which are fixed on the frame part 4 and transmit the vibration to the frame part 4, wherein the frame part 4 has beam parts 5a and 5b and fixed parts 6a to 6d located at both ends of the beam parts 5a and 5b, the mirror supporting parts 3a and 3b are connected at the connected parts Qa and Qb of the beam parts 5a and 5b, the frame part 4 is fixed to the second member 11 at the fixed parts 6a to 6d, the piezoelectric bodies 12a and 12b provided across the fixed parts 6a and 6b and the beam part 5a, and through holes 7a and 7b are provided at the beam part 5a between the piezoelectric bodies 12a and 12b and the connected part Qa. COPYRIGHT: (C)2008,JPO&INPIT
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