| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding tool (10) capable of flexibly corresponding to change of kinds, sizes, and the number of a plurality of plate-like materials (8), reducing sucking trouble such as clogging during sucking, and allowing the plurality of the plate-like materials to be adsorbed and held on a holding table (12). SOLUTION: The holding jig is composed of a hard plate (22) mounted on the holding table and a surface layer member (24) laminated on the hard plate. A number of holes (26) penetrating the hard plate from the surface to the rear surface are formed at the hard plate. A plurality of openings (23) corresponding to the outer shape of the plate-like material are formed at the surface layer member. The thickness of the surface layer member is less than that of the plate-like material. COPYRIGHT: (C)2010,JPO&INPIT
|
