| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft magnetic thin film which has high saturation magnetic flux density and can prevent its magnetic permeability from dropping, by suppressing increase in the anisotropic magnetic field accompanying the increase in oxygen concentration, and with which the characteristics of a thin film magnetic head can be improved. SOLUTION: This soft magnetic thin film has a composition expressed by the chemical formula Fea .Cob .Cc .Od , and in the formula, the a, b, c, and d atomic percentages are set so as to satisfy 51.0<=a<=95.0, 5.0<=b<=49.0, 0.5<=c<=10.0, 0.5<=d<=20.0, and a+b+c+d=100, respectively. |
