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发明名称
STRIPPING OF PHOTOSETTING PHOTORESIST LAYER
摘要
申请公布号
KR940007781(B1)
申请公布日期
1994.08.25
申请号
KR19860006980
申请日期
1986.08.23
申请人
HOECHST AG.
发明人
STEPHAN, HARTMUT;GEISLER, ULICH
分类号
G03D3/06;G03F7/42;(IPC1-7):G03C1/805
主分类号
G03D3/06
代理机构
代理人
主权项
地址
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