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发明名称
THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD
摘要
申请公布号
JPH1092596(A)
申请公布日期
1998.04.10
申请号
JP19960242781
申请日期
1996.09.13
申请人
TOSHIBA CORP
发明人
ASHIDA SUMIO
分类号
H05H1/46;C23C16/50;H01L21/205;H01L21/285;H01L21/31;(IPC1-7):H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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