发明名称 LDMOS STRUCTURE WITH VIA GROUNDED SOURCE
摘要 A lateral conduction MOS structure, comprising: a semiconductor substrate of a first conductivity type having an epitaxial semiconductor layer of said first conductivity type disposed thereon; a source layer and a drain layer, said source layer and said drain layer of a second conductivity type; a channel layer disposed between said source layer and said drain layer, said channel having an oxide layer and a gate disposed thereon; characterized in that: a metallized via electrically connects said top surface to said substrate.
申请公布号 WO9928976(A1) 申请公布日期 1999.06.10
申请号 WO1998US25604 申请日期 1998.12.03
申请人 THE WHITAKER CORPORATION 发明人 MKHITARIAN, ARAM
分类号 H01L29/10;H01L29/417;(IPC1-7):H01L29/78 主分类号 H01L29/10
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