| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck mechanism capable of preventing the occurrence of elastic deformation on the machining face of a workpiece, and also, capable of improving the productivity, and a machining device and a machining method using the same. SOLUTION: The chuck mechanism 40 holds the workpiece W when the workpiece W is machined. The chuck mechanism 40 is provided with a plurality of claw parts 61 and a claw driving source 39. The plurality of claw parts 61 execute the closing operation of simultaneously moving by the actuation of the claw driving source 39. Consequently, centering of the workpiece W is executed by the abutment of the claw parts 61 on the outer peripheral face of the workpiece W. After that, negative pressure is imparted to the holding face of the workpiece W by actuating a suction means 36. The workpiece W is held to a workpiece holding means 50 by sucking. Then, the plurality of claw parts 61 execute the opening operation of simultaneously moving by the actuation of the claw driving source 39. Consequently, it is preferable that the claw parts 61 are evacuated from the outer peripheral side of the workpiece W. COPYRIGHT: (C)2005,JPO&NCIPI
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