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发明名称
半导体制造用静电卡盘的吸盘
摘要
申请公布号
CN300766806D
申请公布日期
2008.04.16
申请号
CN200730002042.X
申请日期
2007.01.29
申请人
东京毅力科创株式会社
发明人
佐佐木康晴;小坂井守
分类号
15-99
主分类号
15-99
代理机构
北京纪凯知识产权代理有限公司
代理人
龙 淳
主权项
地址
日本东京
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