APPARATUS AND METHOD FOR SUPPLYING MATERIAL TO A SUBSTRATE

摘要

PCT No. PCT/GB96/01671 Sec. 371 Date Jan. 12, 1998 Sec. 102(e) Date Jan. 12, 1998 PCT Filed Jul. 11, 1996 PCT Pub. No. WO97/02903 PCT Pub. Date Jan. 30, 1997An apparatus and method are described for supplying material to a substrate (109). The apparatus includes a member (3) having a surface with a plurality of features (8) which locate, in use, menisci of a liquid (1) supplied to the member. An actuator (4) induces mechanical vibrations within the liquid located by the features to cause liquid droplets (7) to be sprayed. Liquid (1) is supplied to the member and electrical charge is supplied to the member and electrical charge is supplied to the liquid by, for example, an electrode (14). Electrical charge or potential is also supplied to the substrate (109) so that the droplets are directed towards the substrate to deposit material thereon.