| 摘要 |
PURPOSE: To adjust the capacity difference between upper capacity and lower capacity, in a capacity type acceleration sensor. CONSTITUTION: A capacity regulating groove 6 is formed in both upper fixed and movable electrodes 4 and 9 forming the upper capacity or a lower fixed electrode 5 forming the lower capacity and one side of the lower fixed electrode 5 and thereby, capacity differences of two capacities are adjusted in advance, or after assembling a sensor, the capacity regulating groove 6 is formed in a part of the upper fixed electrode 4 or the lower fixed electrode 5 in use of a laser trimming from the outside. With this constitution, any capacity difference between two capacities is eliminated, thereby, the regulating of offset voltage in sensor output is facilitated and/or it is made into nonregulation. |
