发明名称 METHOD FOR BONDING
摘要 PURPOSE:To improve the rate of yield in a bonding process by a method wherein a wire accommodated in a capillary is gripped at its middle point by an upper clamp, when an upper clamp and a lower clamp, and a wire-accommodating capillary travelling up and down are employed in a bonding process. CONSTITUTION:After bonding of an Au ball 12 to a pellet 1 at a position 13, the capillary 10 goes up, and then comes down again. When the Au wire 3 is bonded to a lead frame 2, an upper clamp grips the Au wire 3. This keeps the Au wire 3 positioned under the capillary 10 from an excessive slack, thereby improving the rate of yield in a bonding process.
申请公布号 JPS5834935(A) 申请公布日期 1983.03.01
申请号 JP19810133194 申请日期 1981.08.25
申请人 TOKYO SHIBAURA DENKI KK 发明人 CHIBA KOUICHI;WATANABE TAKAO
分类号 H01L21/60 主分类号 H01L21/60
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