| 摘要 |
PURPOSE:To simplify operation of searching for the visual field of a large sample by using a device such as a scanning electron microscope and an ion scanning microscope which displays a scanning image by means of sample scanning utilizing charged particle raditation, in order to enable a static scanning image of a sample moving at constant speed to be visually observed. CONSTITUTION:When such a specified operation is imposed on a mobile control circuit 9 as to make a sample to move in the left direction as illustrated in the figure at the speed of M/T(M=w), the sample 5 starts to move, for intance, in the direction of an arrow 11 as illustrated. Further a scanning signal is supplied to a deflection coil 4x of electron rays, an electron ray scanning region inside of a reference surface is to be the region SO encircled by a solid line as ullustrated, while the regions S1, S2,...S6 in the sample 5 are successively displayed through changeover process at every scanning on a CRT picture. In this way, not only the scanning image to be displayed in the CRT picture becomes so clear and free of deflection as the sample being static but also a visual field relating to a horizontal zonal region inside of the sample surface can be observed through sequential changover. |
