LOAD LOCK MECHANISM,申请号GB19840012829-传众专利搜索

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发明名称	LOAD LOCK MECHANISM
摘要
申请公布号	GB8412829(D0)	申请公布日期	1984.06.27
申请号	GB19840012829	申请日期	1984.05.18
申请人	LFE CORPORATION	发明人
分类号	B65G49/07;H01L21/677;(IPC1-7):H05H1/46	主分类号	B65G49/07
代理机构		代理人
主权项
地址

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