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发明名称
摘要
申请公布号	JPH01148672(U)	申请公布日期	1989.10.16
申请号	JP19880045854U	申请日期	1988.04.05
申请人		发明人
分类号	G01R31/26;G01R1/067;H01L23/32;H01R11/24;H01R33/76;(IPC1-7):H01R11/24	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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