发明名称 |
Magnetic lens apparatus for a low-voltage high-resolution electron microscope |
摘要 |
A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.
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申请公布号 |
US5563415(A) |
申请公布日期 |
1996.10.08 |
申请号 |
US19950487926 |
申请日期 |
1995.06.07 |
申请人 |
ARCH DEVELOPMENT CORPORATION |
发明人 |
CREWE, ALBERT V. |
分类号 |
G01Q30/02;H01J37/141;(IPC1-7):H01J37/14 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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