发明名称 |
Lead coplanarity inspection apparatus and method thereof |
摘要 |
An apparatus for and method of determining the coplanarity of leads of a semiconductor device is provided. The apparatus comprises a base (24) for placing the semiconductor device, and a plurality of mirrors (38) and (36) surrounding the base. The mirrors reflect an image of the leads of the semiconductor device to a camera. The camera records an image from which the lead coplanarity is determined. The base contains an optical datum (34) which provides a reference plane from which to measure coplanarity. The mirrors can be placed such that an off-axis image of the leads is reflected to the camera. The off-axis image improves the apparent sensitivity of the coplanarity measurement.
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申请公布号 |
US5563703(A) |
申请公布日期 |
1996.10.08 |
申请号 |
US19950541346 |
申请日期 |
1995.10.10 |
申请人 |
MOTOROLA, INC. |
发明人 |
LEBEAU, CHRISTOPHER J.;HOPKINS, JAMES E. |
分类号 |
H05K13/08;(IPC1-7):G01B11/24 |
主分类号 |
H05K13/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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