| 摘要 |
PURPOSE:To obtain an aluminum nitride sintered compact improved in quality by incorporating AlN powder of particular specific surface area with a rare earth metal oxide plus an alkaline earth metal oxide as sintering auxiliaries, or the corresponding compounds producing these oxides by sintering at each specified proportion followed by molding and then sintering. CONSTITUTION:Firstly, AlN powder of 4.0-8.0m<2>/g specific surface area (the mean particle diameter being calculated as 0.23-0.46mum) and <=1.8wt.% oxygen content is incorporated with 0.5-10wt.%, based on the final sintered compact, of a rare earth metal oxide such as Y2O3 or a compound producing the oxide by sintering and 0.1-10wt.% of an alkaline earth metal oxide or a compound producing the oxide by sintering (e.g. CaCO3) as sintering auxiliaries and pref. 0.05-3wt.% of LaB6 <=10mum in mean particle diameter. The resultant mixture is then put to pressure molding and sintered in a nonoxidative atmosphere such as N2 at <=1640 deg.C for a specified time, thus obtaining the objective AlN sintered compact with a thermal conductivity of as high as >=120W/mk. |
