| 摘要 |
<p>A balanced pressure sensor employing a first and a second pair of piezoresistive elements (56,58) are positioned adjacent to an edge (54) of a silicon diaphragm (50). Each of pair of piezoresistive elements (56,58) is additionally positioned to lie on opposite sides of a line of stress maxima points and consists of at least two resistors oriented with their long axis's perpendicular to one another. <IMAGE></p> |
